Dr. Xiao-dong Wang
at Institute of Semiconductors CAS
SPIE Involvement:
Author
Publications (7)

Proceedings Article | 24 November 2021 Paper
Zhen Huang, Wei Yan, Zhaofeng Li, Hui Dong, Fuhua Yang, Xiaodong Wang
Proceedings Volume 12061, 120610F (2021) https://doi.org/10.1117/12.2603258

Proceedings Article | 1 November 2021 Paper
Proceedings Volume 12057, 120571S (2021) https://doi.org/10.1117/12.2605460
KEYWORDS: Modulation, Backscatter, Gyroscopes, Resonators, Waveguides, Signal detection, Phase modulation, Demodulation, Interference (communication), Integrated optics

Proceedings Article | 20 December 2019 Paper
Proceedings Volume 11209, 112094V (2019) https://doi.org/10.1117/12.2549964
KEYWORDS: Semiconducting wafers, Wafer bonding, Plasma, Gallium arsenide, Silicon, Argon, Interfaces, Reactive ion etching, Chemical analysis, Multijunction solar cells

SPIE Journal Paper | 14 May 2012
Yan-Dong Du, Wei-Hua Han, Wei Yan, Xiao-Na Xu, Yan-Bo Zhang, Xiao-dong Wang, Fu-Hua Yang, Hong-Zhong Cao, Feng Jin, Xian-Zi Dong, Zhen-Sheng Zhao, Xuan-Ming Duan, Yang Liu
OE, Vol. 51, Issue 5, 054303, (May 2012) https://doi.org/10.1117/12.10.1117/1.OE.51.5.054303
KEYWORDS: Femtosecond phenomena, Lithography, Photoresist materials, Silicon, Sapphire, Submicron lithography, Gallium nitride, Fabrication, Head, Absorption

Proceedings Article | 4 January 2008 Paper
Yan Li, Xiaoyan Yi, Xiaodong Wang, Jinxia Guo, Liangchen Wang, Guohong Wang, Fuhua Yang, Yiping Zeng, Jinmin Li
Proceedings Volume 6841, 68410X (2008) https://doi.org/10.1117/12.759809
KEYWORDS: Plasma, Light emitting diodes, Etching, Plasma enhanced chemical vapor deposition, Gallium nitride, Ions, Dry etching, Dielectrics, Optical properties, Silica

Showing 5 of 7 publications
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