Rayleigh backscattering noise in resonator integrated optic gyroscopes is researched both theoretically and experimentally. Characteristics of Rayleigh backscattering noise in the resonator of silicon nitride on silicon substrate are formulized, and the static state and dynamic state models are constructed. The relationship between the optical signal and backscattering noise is simulated, and the affection between the interference signal of backscattering noise and the reverse optical signal is also calculated. The influence of backscattering noise on the performance of the resonator is analyzed. The method of inflicting two different waveforms to the integrated optical modulator is presented. The experimental results show that triangular wave modulation can effectively suppress backscattering noise in resonator integrated optic gyroscopes.
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