Dr. Yongqiang Zhao Profile

Dr. Yongqiang Zhao

at Institute of Semiconductor, CAS

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Publications (1)

Proceedings Article | 20 December 2019 Paper

Direct wafer bonding of GaAs/Si by hydrophobic plasma-activated bonding

Yongqiang Zhao, Wen Liu, Yidi Bao, Jing Ma, Yusheng Liu, Xiaodong Wang, Fuhua Yang

Proceedings Volume 11209, 112094V (2019) https://doi.org/10.1117/12.2549964

KEYWORDS: Semiconducting wafers, Wafer bonding, Plasma, Gallium arsenide, Silicon, Argon, Interfaces, Reactive ion etching, Chemical analysis, Multijunction solar cells

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