Mr. Robert M. Karl Profile

Robert M. Karl

Graduate Research Assistant at JILA University of Colorado Boulder

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Author

Publications (11)

Proceedings Article | 28 September 2023 Poster + Paper

Soft x-ray vector ptycho-tomography: a new quantitative vector nanoimaging method for spin textures in 3D

Chen-Ting Liao, Arjun Rana, Ezio Iacocca, Ji Zou, Minh Pham, Xingyuan Lu, Emma-Elizabeth Cating Subramanian, Yuan Hung Lo, Sinéad Ryan, Charles Bevis, Robert Karl, Andrew Glaid, Jeffrey Rable, Pratibha Mahale, Joel Hirst, Thomas Ostler, William Liu, Colum O’Leary, Young-Sang Yu, Karen Bustillo, Hendrik Ohldag, David Shapiro, Sadegh Yazdi, Thomas Mallouk, Stanley Osher, Henry Kapteyn, Vincent Crespi, John Badding, Yaroslav Tserkovnyak, Margaret Murnane, Jianwei Miao

Proceedings Volume 12656, 126560U (2023) https://doi.org/10.1117/12.2679845

KEYWORDS: Magnetism, X-rays, X-ray imaging, Physics, Coherence imaging, 3D image processing, Optical coherence, Nanoimaging, Tomography, Spatial resolution

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Proceedings Article | 26 March 2019 Presentation

Variable-wavelength tabletop-scale EUV ptychographic complex imaging reflectometry for 3D composition determination (Conference Presentation)

Michael Tanksalvala, Christina Porter, Yuka Esashi, Galen Miley, Robert Karl, Peter Johnsen, Nicholas Jenkins, Charles Bevis, Bin Wang, Jeremy Thurston, Xiaoshi Zhang, Seth Cousin, Daniel Adams, Michael Gerrity, Henry Kapteyn, Margaret Murnane.

Proceedings Volume 10959, 109590G (2019) https://doi.org/10.1117/12.2516827

KEYWORDS: Extreme ultraviolet, Stereoscopy, Reflectometry, 3D image processing

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Proceedings Article | 26 March 2019 Presentation

Progress on sub-wavelength nanoimaging with a coherent tabletop EUV source (Conference Presentation)

Charles Bevis, Robert Karl, Bin Wang, Peter Johnsen, Michael Tanksalvala, Christina Porter, Yuka Esashi, Henry Kapteyn

Proceedings Volume 10959, 109590W (2019) https://doi.org/10.1117/12.2517026

KEYWORDS: Nanoimaging, Extreme ultraviolet

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Proceedings Article | 13 March 2018 Paper

Prototype through-pellicle coherent imaging using a 30nm tabletop EUV source

Charles Bevis, Robert Karl, Bin Wang, Yuka Esashi, Michael Tanksalvala, Christina Porter, Peter Johnsen, Daniel Adams, Margaret Murnane, Henry Kapteyn

Proceedings Volume 10585, 105852O (2018) https://doi.org/10.1117/12.2307861

KEYWORDS: Coherence imaging, Extreme ultraviolet, Extreme ultraviolet lithography, Pellicles, Photomasks, Imaging systems, Metrology, Wafer-level optics, Reflectivity, Semiconducting wafers

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Proceedings Article | 13 March 2018 Paper

Complex EUV imaging reflectometry: spatially resolved 3D composition determination and dopant profiling with a tabletop 13nm source

Christina Porter, Michael Tanksalvala, Michael Gerrity, Galen Miley, Yuka Esashi, Naoto Horiguchi, Xiaoshi Zhang, Charles Bevis, Robert Karl, Peter Johnsen, Daniel Adams, Henry Kapteyn, Margaret Murnane

Proceedings Volume 10585, 105850M (2018) https://doi.org/10.1117/12.2297464

KEYWORDS: Reflectometry, Reflectivity, Extreme ultraviolet, Silicon, Coherence imaging, Cameras, Stereoscopy, 3D image processing, 3D metrology, Profiling

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Proceedings Article | 13 March 2018 Presentation + Paper

Characterization and imaging of nanostructured materials using tabletop extreme ultraviolet light sources

Robert Karl, Joshua Knobloch, Travis Frazer, Michael Tanksalvala, Christina Porter, Charles Bevis, Weilun Chao, Begoña Abad Mayor, Daniel Adams, Giulia Mancini, Jorge Hernandez-Charpak, Henry Kapteyn, Margaret Murnane

Proceedings Volume 10585, 105850N (2018) https://doi.org/10.1117/12.2297223

KEYWORDS: Acoustics, Extreme ultraviolet, Nanostructures, Diffraction, Coherence imaging, Nickel, Thin films, Wave propagation, Silicon, Nanostructuring

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Proceedings Article | 28 March 2017 Paper

Sub-wavelength transmission and reflection mode tabletop imaging with 13nm illumination via ptychography CDI

Michael Tanksalvala, Christina Porter, Dennis Gardner, Michael Gerrity, Giulia Mancini, Xiaoshi Zhang, Galen Miley, Elisabeth Shanblatt, Benjamin Galloway, Charles Bevis, Robert Karl, Daniel Adams, Henry Kapteyn, Margaret Murnane

Proceedings Volume 10145, 101450L (2017) https://doi.org/10.1117/12.2271386

KEYWORDS: Diffraction, Sensors, Extreme ultraviolet, Reconstruction algorithms, Image resolution, Mirrors, Spatial resolution, Image transmission, Microscopes, Detection and tracking algorithms

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Proceedings Article | 30 September 2016 Presentation + Paper

Multiple beam ptychography for large field of view imaging

Charles Bevis, Robert Karl, Jonathan Reichanadter, Dennis Gardner, Christina Porter, Elisabeth Shanblatt, Michael Tanksalvala, Giulia Mancini, Margaret Murnane, Henry Kapteyn, Daniel Adams

Proceedings Volume 9948, 99480U (2016) https://doi.org/10.1117/12.2236242

KEYWORDS: Coherence imaging, Image resolution, Diffraction, Sensors, Imaging systems, X-ray imaging, X-rays, Data acquisition, Microscopes, Extreme ultraviolet

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Proceedings Article | 21 April 2016 Paper

Lensless hyperspectral spectromicroscopy with a tabletop extreme-ultraviolet source

Dennis Gardner, Bosheng Zhang, Matthew Seaberg, Elisabeth Shanblatt, Christina Porter, Robert Karl, Christopher Mancuso, Henry Kapteyn, Margaret Murnane, Daniel Adams

Proceedings Volume 9778, 977808 (2016) https://doi.org/10.1117/12.2220711

KEYWORDS: Extreme ultraviolet, Coherence imaging, Defect inspection, Process control, Multiplexing, Diffraction, Reflectivity, Photons, Coherent x-ray sources, Phase imaging, X-rays, Silicon, Microscopy

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Proceedings Article | 21 April 2016 Paper

Multiple beam ptychography

Robert Karl, Charles Bevis, Raymond Lopez-Rios, Jonathan Reichanadter, Dennis Gardner, Christina Porter, Elisabeth Shanblatt, Michael Tanksalvala, Giulia Mancini, Margaret Murnane, Henry Kapteyn, Daniel Adams

Proceedings Volume 9778, 97780F (2016) https://doi.org/10.1117/12.2220416

KEYWORDS: Polarization, Spectroscopy, Coherence imaging, Laser beam diagnostics, Deconvolution, Reconstruction algorithms, Metrology, Spatial filters, Diffraction gratings, Wave propagation

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Proceedings Article | 21 April 2016 Paper

Spectroscopic imaging of buried layers in 2+1D via tabletop ptychography with high-harmonic EUV illumination

Dennis Gardner, Christina Porter, Elisabeth Shanblatt, Giulia Mancini, Robert Karl, Michael Tanksalvala, Charles Bevis, Henry Kapteyn, Margaret Murnane, Daniel Adams

Proceedings Volume 9778, 97780J (2016) https://doi.org/10.1117/12.2220368

KEYWORDS: Extreme ultraviolet, Coherence imaging, Microscopy, Spectroscopy, High harmonic generation, Overlay metrology, Imaging spectroscopy, Mirrors, Interfaces

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Showing 5 of 11 publications

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