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Andreia Santos
at SCREEN SPE Germany GmbH
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Publications (1)
Proceedings Article | 9 April 2024 Poster + Paper
Light-curable underlayers for non-baking process in EUV lithography
Seungjoo Baek, Seonggil Heo, Jelle Vandereyken, Hyo Seon Suh, Elke Caron, Andreia Santos, Masahiko Harumoto, Douglas Guerrero
Proceedings Volume 12957, 129572G (2024) https://doi.org/10.1117/12.3012855
KEYWORDS: Power consumption, Etching, Spin on carbon materials, Semiconductors, Optical lithography, Line edge roughness, Thermography, Extreme ultraviolet lithography, Lithography, Industry
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