Mr. Ziqi Li Profile

Ziqi Li

at Institute of Microelectronics

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Publications (2)

Proceedings Article | 12 November 2024 Poster + Paper

The impact of aberrations in extreme ultraviolet lithography systems on exposure results

Jiashuo Wang, Ziqi Li, Xiaojing Su, Yayi Wei

Proceedings Volume 13215, 132150Z (2024) https://doi.org/10.1117/12.3034457

KEYWORDS: Monochromatic aberrations, Extreme ultraviolet lithography, Zernike polynomials, Lithography, Picosecond phenomena, Pupil aberrations, Source mask optimization, Wavefront aberrations, Wavefronts, Spherical lenses

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Proceedings Article | 10 April 2024 Poster + Paper

Source optimization based on compression sensing for plasmonic lithography

Jianfang He, Ziqi Li, Huwen Ding, Lisong Dong, Yayi Wei

Proceedings Volume 12953, 1295316 (2024) https://doi.org/10.1117/12.3010575

KEYWORDS: Lithography, Plasmonics, Mathematical optimization, Photoresist materials, Matrices, Compressed sensing, Imaging systems, Reconstruction algorithms, Evanescence, Image resolution

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