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Yuji Namie
at JSR Engineering Co Ltd
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Publications (1)
Proceedings Article | 26 March 2013 Paper
Polymer blends for directed self-assembly
Proceedings Volume 8680, 86801M (2013) https://doi.org/10.1117/12.2011418
KEYWORDS: Polymers, Optical lithography, Photoresist materials, Annealing, Lithography, Materials processing, Photoresist developing, Directed self assembly, Interfaces, Photoresist processing
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