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Yuji Asakawa
Product Marketing Manager at Lasertec USA Inc
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Publications (1)
Proceedings Article | 28 March 2017 Paper
High throughput and dense sampling metrology for process control
Lei Sun, Tsunehito Kohyama, Kuniaki Takeda, Hiroto Nozawa, Yuji Asakawa, Taher Kagalwala, Granger Lobb, Frank Mont, Xintuo Dai, Shyam Pal, Wenhui Wang, Jongwook Kye, Francis Goodwin
Proceedings Volume 10145, 101452D (2017) https://doi.org/10.1117/12.2258623
KEYWORDS: Process control, Metrology, Optical metrology, Defect inspection, Inspection, Semiconducting wafers, Critical dimension metrology, Finite element methods, Wafer-level optics, Line edge roughness, Lithography, Optics manufacturing
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