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Victoria Malacara
at imec
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Publications (1)
Proceedings Article | 12 November 2024 Presentation + Paper
Unfolding the curves: novel designs and metrology methods for curvilinear masks qualification
Darko Trivković, Xuelong Shi, Yi-Pei Tsai, Chieh-Miao Chang, Jane Wang, Victoria Malacara, Balakumar Baskaran, Youssef Drissi, Joost Bekaert, Kenichi Miyaguchi
Proceedings Volume 13216, 132160I (2024) https://doi.org/10.1117/12.3036470
KEYWORDS: Photomasks, Critical dimension metrology, Metrology, Optical proximity correction, Manufacturing, Semiconducting wafers, Logic, Industry, Industrial applications, Silicon photonics
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