Mr. Richard Y. Yang Profile

Richard Y. Yang

YTS Director at KLA-Tencor Corp

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Publications (2)

Proceedings Article | 20 August 2004 Paper

0.13/0.15-µm production reticle process window qualification procedure for 200mm manufacturing fab

Zih-Wen Chang, Chen-Ming Wu, Mabel Mo, Chin-Chung Shieh, D.S. Cheng, Chun-Chien Chen, Richard Yang, David Randall, Wen-Cheng Yu

Proceedings Volume 5446, (2004) https://doi.org/10.1117/12.557698

KEYWORDS: Reticles, Semiconducting wafers, Manufacturing, Inspection, Critical dimension metrology, Metals, Resolution enhancement technologies, Wafer inspection, Scanning electron microscopy, Lithography

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Proceedings Article | 27 August 1999 Paper

Defect reduction strategy for plasma etch

Richard Yang

Proceedings Volume 3884, (1999) https://doi.org/10.1117/12.361330

KEYWORDS: Etching, Semiconducting wafers, Plasma etching, Inspection, Plasma, Metals, Silicon, Laser scattering, Inspection equipment, Photoresist processing

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