Mr. Chen-Ming Wu Profile

Chen-Ming Wu

at Taiwan Semiconductor Manufacturing Co Ltd

SPIE Involvement:

Author

Publications (3)

Proceedings Article | 12 December 2009 Paper

Model-based scanner tuning for process optimization

Tsung-Chih Chien, C. Y. Shih, R. C. Peng, H. H. Liu, Y. C. Chen, H. J. Lee, John Lin, K. W. Chang, C. M. Wu, W. H. Hung, Tommy Lee, H. C. Wu, X. Xie, W. J. Shao, C. H. Chang, R. Aldana, Y. Cao, R. Goossens, Simon Hsieh

Proceedings Volume 7520, 75201Q (2009) https://doi.org/10.1117/12.842551

KEYWORDS: Scanners, Semiconducting wafers, Calibration, Lithography, Yield improvement, Model-based design, Data modeling, Wafer-level optics, Optimization (mathematics), Process modeling

Read Abstract +

Proceedings Article | 20 August 2004 Paper

0.13/0.15-µm production reticle process window qualification procedure for 200mm manufacturing fab

Zih-Wen Chang, Chen-Ming Wu, Mabel Mo, Chin-Chung Shieh, D.S. Cheng, Chun-Chien Chen, Richard Yang, David Randall, Wen-Cheng Yu

Proceedings Volume 5446, (2004) https://doi.org/10.1117/12.557698

KEYWORDS: Reticles, Semiconducting wafers, Manufacturing, Inspection, Critical dimension metrology, Metals, Resolution enhancement technologies, Wafer inspection, Scanning electron microscopy, Lithography

Read Abstract +

Proceedings Article | 26 June 2003 Paper

Process window monitoring: an emerging requirement for efficient low-k1 lithography

S. Chiua, Yao-Chang Chu, J. Hsieh, Wang Pen Mo, C. Wu, Thomas Teng, Mike Slessor

Proceedings Volume 5040, (2003) https://doi.org/10.1117/12.485450

KEYWORDS: Lithography, Semiconducting wafers, Finite element methods, Critical dimension metrology, Scanners, Optical lithography, Optics manufacturing, Control systems, Manufacturing, Radar

Read Abstract +

View contact details

UPDATE YOUR PROFILE

Is this your profile? Update it now.

Sign into your SPIE.org account

Don’t have a profile and want one?

Create an account on SPIE.org

Keywords/Phrases

Search In:

Publication Years