Mr. Raj Kishor Patil Profile

Raj Kishor Patil

at ASML

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Publications (1)

SPIE Journal Paper | 21 January 2014

Fabrication of large-area two-dimensional array of air holes with different hole shapes for optical and terahertz wavelength regions

Raj Patil, Sheng Lan, Achanta Gopal

JNP, Vol. 8, Issue 01, 083896, (January 2014) https://doi.org/10.1117/12.10.1117/1.JNP.8.083896

KEYWORDS: Computer aided design, Gold, Electron beam lithography, Terahertz radiation, Etching, Local area networks, Scanning electron microscopy, Plasmonics, Dry etching, Crystals

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