Dr. Peng Xu
at Beijing Superstring Academy of Memory Technology
SPIE Involvement:
Author
Publications (8)

Proceedings Article | 12 November 2024 Poster + Paper
Proceedings Volume 13216, 1321620 (2024) https://doi.org/10.1117/12.3034460
KEYWORDS: Contour modeling, Performance modeling, Calibration, 3D mask effects, Lithography, Optical proximity correction, Modeling

Proceedings Article | 10 April 2024 Poster + Paper
Proceedings Volume 12954, 129541C (2024) https://doi.org/10.1117/12.3010111
KEYWORDS: Optical proximity correction

Proceedings Article | 21 November 2023 Poster + Paper
Futian Wang, Song Sun, Chunlong Yu, Yu Mu, Juan Wei, Xiaonan Liu, Cuixiang Wang, Liang Li, Qingchen Cao, Miao Jiang, Peng Xu, Joshua Jeong, Yilei Zeng, Andy Lan, Jiangliu Shi
Proceedings Volume 12751, 1275117 (2023) https://doi.org/10.1117/12.2686740
KEYWORDS: Optical proximity correction, Lithography, Semiconducting wafers, Resolution enhancement technologies, Logic, Electron beam lithography, Vestigial sideband modulation, Photomask technology, Manufacturing

Proceedings Article | 21 November 2023 Poster + Paper
Proceedings Volume 12751, 1275114 (2023) https://doi.org/10.1117/12.2686135
KEYWORDS: Scanning electron microscopy, Contour extraction, Image segmentation, Lithography, Deep learning

Proceedings Article | 21 November 2023 Poster + Paper
Proceedings Volume 12751, 1275113 (2023) https://doi.org/10.1117/12.2685435
KEYWORDS: Data modeling, Matrices, Optical proximity correction, Machine learning, Lithography, Advanced patterning, Active learning, Process modeling, Deconvolution

Showing 5 of 8 publications
SIGN IN TO:
  • View contact details

UPDATE YOUR PROFILE
Is this your profile? Update it now.
Don’t have a profile and want one?

Advertisement
Advertisement
Back to Top