Mr. Mu Lin Profile

Mu Lin

at Guangdong Univ of Technology

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Publications (1)

Proceedings Article | 28 April 2023 Poster + Paper

Lithography hotspot detection based on residual network

Mu Lin, Fanwenqing Zeng, Yijiang Shen, Yayi Wei

Proceedings Volume 12495, 124951M (2023) https://doi.org/10.1117/12.2657644

KEYWORDS: Education and training, Data modeling, Lithography, Performance modeling, Machine learning, Feature extraction, Statistical modeling, Overfitting, Deep learning, Very large scale integration

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