CONFERENCE PROCEEDINGS
Advanced Search
Prof. Lei Tao
SPIE Involvement:
Author
Publications (4)
Proceedings Article | 13 December 2024 Paper
Automatic measurement of particle size based on scanning electron microscopy
Proceedings Volume 13500, 135000B (2024) https://doi.org/10.1117/12.3048148
KEYWORDS: Particles, Scanning electron microscopy, Calibration, Edge detection, Microspheres, Image analysis, Electron microscopes, Time metrology, Statistical analysis, Reflection
Proceedings Article | 12 December 2024 Paper
Research on nanoscale grid pitch characterization method based on metrological atomic force microscopy
Chong Yue, Yueqing Ding, Zhen Wu, Lei Tao, Yingqian Ni, Kun Jiang
Proceedings Volume 13446, 134461D (2024) https://doi.org/10.1117/12.3054245
KEYWORDS: Atomic force microscopy, Metrology, Interferometers, Atomic force microscope, Algorithm development, Raster graphics, Reliability, MATLAB, Inspection, Semiconductors
Proceedings Article | 4 December 2024 Paper
Characterization of wafer surface morphology based on atomic force microscopy
Yueqing Ding, Chong Yue, Lei Tao, Long Chen, Jin Zhou
Proceedings Volume 13283, 132832I (2024) https://doi.org/10.1117/12.3036788
KEYWORDS: Semiconducting wafers, Atomic force microscopy, Surface roughness, Interferometers, Semiconductors, Microelectronics, Optical surfaces, Atomic force microscope, Time metrology
Proceedings Article | 18 November 2024 Paper
Determination of the characteristic parameter of nanofilm based on ellipsometer and scanning electron microscope
Proceedings Volume 13398, 1339814 (2024) https://doi.org/10.1117/12.3049736
KEYWORDS: Film thickness, Thin films, Scanning electron microscopy, Ellipsometry, Electron microscopes, Nanofilms, Reflection, Systems modeling, Dispersion, Mathematical modeling
SIGN IN TO:
  • View contact details
UPDATE YOUR PROFILE
Is this your profile? Update it now.
Sign into your SPIE.org account
Don’t have a profile and want one?
Create an account on SPIE.org
Advertisement
Advertisement
Back to Top