GaAs Schottky barrier diode (SBD) based terahertz mixer and frequency multiplier represent one of the most important method for terahertz signal emitting and receiving from 0.5THz to 5THz. Compared with original GaAs substrate, quartz using as GaAs SBD circuit base could suppress transmission loss and high order transmission mode on chip, benefits from low dielectric constant of quartz. In this paper, GaAs SBD was integrated on quartz substrate using transfer printing technique, which could achieve membrane device transfer and low cost high output of original GaAs wafer.
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