Dr. Juntao Li Profile

Dr. Juntao Li

at Chinese Academy of Sciences

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Publications (2)

Proceedings Article | 2 July 2019 Presentation + Paper

Machine learning and hybrid metrology using scatterometry and LE-XRF to detect voids in copper lines

Dexin Kong, Koichi Motoyama, Abraham Arceo de la peña, Huai Huang, Brock Mendoza, Mary Breton, Gangadhara Raja Muthinti, Hosadurga Shobha, Liying Jiang, Juntao Li, James Demarest, John Gaudiello, Gauri Karve, Aron Cepler, Matthew Sendelbach, Susan Emans, Paul Isbester, Kavita Shah, Shay Wolfing, Avron Ger

Proceedings Volume 10959, 109590A (2019) https://doi.org/10.1117/12.2515257

KEYWORDS: Metrology, Machine learning, Scatterometry, Copper

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Proceedings Article | 24 January 2013 Paper

Optical emission spectroscopy analysis for Ge2Sb2Te5 etching endpoint detection in HBr/He plasma

Juntao Li, Bo Liu, Zhitang Song, Gaoming Feng, Guanping Wu, Aodong He, Zuoya Yang, Nanfei Zhu, Jia Xu, Jiadong Ren, Songlin Feng

Proceedings Volume 8782, 87820L (2013) https://doi.org/10.1117/12.2018658

KEYWORDS: Etching, Plasma, Bromine, Signal detection, Emission spectroscopy, Interfaces, Process control, Scanning electron microscopy, Signal processing, Optical lithography

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