Dr. Herman Nicolai Profile

Dr. Herman Nicolai

at ASML Netherlands BV

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Author

Publications (3)

SPIE Journal Paper | 22 January 2025

Stable stitching: impact and mitigation of environment on metal-oxide resist imaging

Patricia Marin San Roman, Sonia Castellanos, Gijsbert Rispens, Rik Hoefnagels, Herman Nicolai, Lidia van Lent-Protasova, Jelte van der Valk, Peter De Schepper, Amrit Narasimhan

JM3, Vol. 24, Issue 01, 011011, (January 2025) https://doi.org/10.1117/12.10.1117/1.JMM.24.1.011011

KEYWORDS: Semiconducting wafers, Humidity, Scanners, Extreme ultraviolet lithography, Critical dimension metrology, High volume manufacturing, Printing, Photoresist processing, Reticles, Coating

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Proceedings Article | 18 March 2019 Presentation

Quantifying global and local CD variation for an advanced 3D NAND layer (Conference Presentation)

Will Conley, Yaobin Feng, Zhiyang Song, Moran Guo, Jun He, Longxia Guo, Gang Xu, Simon Hsieh, James Bonafede, Stephen Hsu, Austin Peng, Jun Wei Lu, Victor Peng, Beeri Nativ, Fei Jia, Herman Nicolai, Ijen van Mil

Proceedings Volume 10961, 109610J (2019) https://doi.org/10.1117/12.2515725

KEYWORDS: Critical dimension metrology, Light sources, Semiconducting wafers, Yield improvement, Deep ultraviolet, Scanners, Control systems, Source mask optimization

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Proceedings Article | 20 April 2006 Paper

Charge transport in white-light-emitting polymers

H. Nicolai, A. Hof, P. W. M. Blom

Proceedings Volume 6192, 61922H (2006) https://doi.org/10.1117/12.667237

KEYWORDS: Polymers, Light emitting diodes, Gold, Palladium, Bismuth, Electron transport, Organic light emitting diodes, Thin films, Excitons, Nitrogen

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