Author Affiliations +
Will Conley,1 Yaobin Feng,2 Zhiyang Song,2 Moran Guo,2 Jun He,2 Longxia Guo,2 Gang Xu,2 Simon Hsieh,1 James Bonafede,1 Stephen Hsu,3 Austin Peng,3 Jun Wei Lu,4 Victor Peng,4 Beeri Nativ,5 Fei Jia,5 Herman Nicolai,5 Ijen van Mil5
1Cymer, LLC (United States)
2Yangtze Memory Technologies Co., Ltd. (China)
3ASML Brion Technologies (United States)
4ASML Intl. Trading Co., Ltd. (China)
5ASML Netherlands B.V. (Netherlands)