CONFERENCE PROCEEDINGS
Advanced Search
Guangjian He
at Guangdong Greater Bay Area Institute of Integrated Circuit and Sy
SPIE Involvement:
Author
Publications (2)
Proceedings Article | 10 December 2024 Paper
A methodology for random placement of unit patterns to identify potential design and process optimizations
Jingjing Li, Yi Tong, Guangjian He, Junyu Lu, Yun Wang
Proceedings Volume 13423, 134231I (2024) https://doi.org/10.1117/12.3054474
Proceedings Article | 10 April 2024 Poster + Paper
A new stochastic EUV resist model based on a modified minimal process algorithm
Jing Xue, Guangjian He, Taian Fan, Yun Wang, Tianchun Ye, Yayi Wei
Proceedings Volume 12953, 1295314 (2024) https://doi.org/10.1117/12.3010234
KEYWORDS: Stochastic processes, Systems modeling, Diffusion, Monte Carlo methods, Photoresist materials, Computer simulations, Molecules, Extreme ultraviolet, Photoresist processing, Particles
SIGN IN TO:
  • View contact details
UPDATE YOUR PROFILE
Is this your profile? Update it now.
Sign into your SPIE.org account
Don’t have a profile and want one?
Create an account on SPIE.org
Advertisement
Advertisement
Back to Top