Dr. Gregory D. Cooper Profile

Dr. Gregory D. Cooper

Founder and CTO at Pixelligent Technologies LLC

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Publications (1)

Proceedings Article | 11 March 2010 Paper

Modeling of exploration of reversible contrast enhancement layers for double exposure lithography

Feng Shao, Gregory Cooper, Zhiyun Chen, Andreas Erdmann

Proceedings Volume 7640, 76400J (2010) https://doi.org/10.1117/12.846525

KEYWORDS: Photoresist materials, Lithography, Refractive index, Diffraction, Modulation, Nanoimprint lithography, Absorption, Nanocrystals, Nonlinear optics, Computer simulations

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