Unspecified Dongsu Kim Profile

Dongsu Kim

at SK Hynix Inc

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Publications (1)

Proceedings Article | 27 April 2023 Poster + Paper

Effective tool induced shift (eTIS) for determining the total measurement uncertainty (TMU) in overlay metrology

Hyunsok Kim, Ikhyun Jeong, Baikkyu Hong, Sejung Ham, Dongsu Kim, Dongsuk Lim, Kangmin Lee, Jeongpyo Lee, Minho Jung, Nanglyeom Oh, Dongsub Choi, Hedvi Spielberg, Ohad Bachar

Proceedings Volume 12496, 124963O (2023) https://doi.org/10.1117/12.2670420

KEYWORDS: Semiconducting wafers, Metrology, Calibration, Overlay metrology, Measurement uncertainty, Optical parametric oscillators, Advanced process control, Time metrology, Reproducibility, Optical lithography

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