Novel hybrid reflection zone plates as dispersive elements will allow time-resolved Near Edge X-ray Absorption Fine Structure (tr-NEXAFS) studies in a wide photon energy range from 100 – 1500 eV. We describe two tr-NEXAFS setups using a laser produced plasma (LPP) as well as a high harmonics generation (HHG) source.
We present first experimental results on wavelength-dispersive soft X-ray spectroscopy of TiO2 in the vicinity of the Ti Lσ fluorescence line with a central energy of about 452.2 eV, demonstrating the functionality of a newly developed, laboratory-scaled setup. In our instrument, the micron-sized photon emission from an electronexcited source is collected efficiently by a rotationally symmetric, ellipsoidal mirror and subsequently dispersed by a reflection zone plate with inscribed diffractive wavefront correction, to compensate for figure and alignment errors of the ellipsoid to some degree. The measured data, recorded with a CCD camera in one meter from the source, show clearly separated peaks from different Ti L (398.3 eV and 452.2 eV) contributions and O Kα emission (523.1 eV) with an energy resolving power around 38 and a signal-to-noise ratio between 4.4 and 10.7.
In 2019, the Institut für angewandte Photonik (IAP) e. V. in cooperation with Nano Optics Berlin (NOB) GmbH and SIOS Meßtechnik GmbH has made an important progress in the technology for precision soft X-ray optics – the development of three-dimensional (3-D) reflection zone plates (RZPs) with diffractive compensation of slope errors. 2-D mapping of spherical and toroidal grating substrates was used for the metrology of their individual profile. Based on these data, the inscribed grating structure, which corrects the slope error distribution, was computed. The correction algorithm has been implemented as a Python script, and first pilot samples of slope error compensated RZPs are in fabrication process. The 3-D device can replace two or three components in an optical scheme and, therefore, reduce absorption losses by several orders of magnitude. Beyond, the fabrication of customized 3-D Fresnel structures on curved substrates promises considerable improvements for efficiency, resolution and energy range in wavelength dispersive applications. As an example, we present simulations for a compact instrument within (150 – 250) eV. Further development of this approach toward commercial availability will enable the design and construction of compact soft Xray monochromators and spectrometers with unique parameters.
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