Mr. Boyuan Wang Profile

Boyuan Wang

at Institute of Automation CAS

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Publications (1)

Proceedings Article | 18 June 2024 Poster + Paper

Scatterometry of nano-particles on silicon wafer

Lihong Liu, Yijie Ren, Huabin Yang, Boyuan Wang, Xingang Wang, Zhengtao Zhang

Proceedings Volume 12997, 129971Q (2024) https://doi.org/10.1117/12.3016661

KEYWORDS: Rayleigh scattering, Particles, Silicon, Semiconducting wafers, Optical spheres, Laser scattering, Scattering, Nanoparticles, Refractive index, Electromagnetic scattering

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