Dr. Elizabeth Grubbs Profile

Dr. Elizabeth Grubbs

at Synopsys Inc

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Publications (2)

Proceedings Article | 12 November 2024 Presentation + Paper

Metalens response to process variation

Andrew M. Dawes, Lawrence Melvin, Maryvonne Chalony, Betsy Grubbs, Phil Stopford, Jian Rao, Rajeev Ranjan, Joachim Siebert, JiSoo Park, Ying Zhou

Proceedings Volume 13216, 132161F (2024) https://doi.org/10.1117/12.3034641

KEYWORDS: Manufacturing, Etching, Design, Lithography, Optics manufacturing, Metalenses, Lens design, Phase shifts, Thin films, Infrared telescopes

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Proceedings Article | 10 April 2024 Presentation + Paper

Advances in full-chip three-dimensional resist modeling for low k1 EUV and DUV lithography

Elizabeth Grubbs, Bernd Kuechler, Hyesook Hong, Enas Sakr, Lena Zavyalova, Folarin Latinwo, Delian Yang, Linghui Wu, Yan Feng, Kevin Lucas

Proceedings Volume 12954, 129540S (2024) https://doi.org/10.1117/12.3013125

KEYWORDS: 3D modeling, Modeling, Lithography, Data modeling, Calibration, Deep ultraviolet, Optical proximity correction, Extreme ultraviolet, Photoresist processing, Shrinkage

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