Mr. Akira Miura Profile

Akira Miura

at e-BEAM Corp

SPIE Involvement:

Author

Publications (3)

Proceedings Article | 16 June 2003 Paper

Maskless lithography: a low-energy electron-beam direct writing system with a common CP aperture, and recent progress

Tetsuro Nakasugi, Atsushi Ando, Ryoichi Inanami, Noriaki Sasaki, Takumi Ota, Osamu Nagano, Yuuichiro Yamazaki, Kazuyoshi Sugihara, Ichiro Mori, Motosuke Miyoshi, Katsuya Okumura, Akira Miura

Proceedings Volume 5037, (2003) https://doi.org/10.1117/12.483607

KEYWORDS: Scanning electron microscopy, Virtual colonoscopy, System on a chip, Logic devices, Maskless lithography, Lenses, Semiconducting wafers, Inspection, Electron beam direct write lithography, Lithography

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Proceedings Article | 16 June 2003 Paper

Maskless lithography: estimation of the number of shots for each layer in a logic device with character-projection-type low-energy electron-beam direct writing system

Ryoichi Inanami, Shunko Magoshi, Shouhei Kousai, Atsushi Ando, Tetsuro Nakasugi, Ichiro Mori, Kazuyoshi Sugihara, Akira Miura

Proceedings Volume 5037, (2003) https://doi.org/10.1117/12.483702

KEYWORDS: Back end of line, Vestigial sideband modulation, Logic devices, Metals, Data processing, Photomasks, Electron beams, Electron beam direct write lithography, Computer aided design, Beam shaping

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Proceedings Article | 8 April 2003 Paper

Operation of ASTER and its data production

Hiroshi Watanabe, Takasi Inada, Kannari Yoshiaki, Akira Miura

Proceedings Volume 4881, (2003) https://doi.org/10.1117/12.463058

KEYWORDS: Clouds, Data acquisition, Data archive systems, Data centers, Data processing, Data modeling, Calibration, Sensors, Satellites, Short wave infrared radiation

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