Yasuo Ohtera, Hiroyuki Ohkubo, Kenta Miura, Takashi Sato, Takayuki Kawashima, Shojiro Kawakami
Optical Engineering, Vol. 43, Issue 05, (May 2004) https://doi.org/10.1117/1.1695407
TOPICS: Waveguides, Photonic crystals, Resonators, Channel waveguides, Optical fibers, Heterojunctions, Wave propagation, Refractive index, Integration, Dispersion
We report a strategy for the industrialization of photonic-crystal-based optical devices, starting with a review of the requirements for passive photonic crystal components. Although they have remarkable properties, such components are difficult to couple to/from optical fibers and have a relatively large propagation loss. We present an approach for meeting the requirements by using heterostructured photonic crystals fabricated by the autocloning technology. A low-loss, simple structured waveguide and sophisticated functional blocks (such as a resonator) can be integrated by a simple process. We first prepare a substrate patterned and corrugated by electron beam lithography and dry etching. Ta2O5/SiO2 multilayers are repeatedly deposited on the substrate, and no other process is needed to complete the chip. After dicing and polishing, the waveguide can be butt-jointed with an optical fiber, and the loss is estimated as 0.1 dB/mm. A resonator with Q =11,700 is also demonstrated. Recent progress and the future outlooks for the technology are also discussed.