KEYWORDS: Scanning electron microscopy, Reflectivity, Power meters, Direct methods, Laser systems engineering, Light scattering, Scattering, Atomic force microscopy, Femtosecond phenomena, Laser scattering, Process control, Scanning tunneling microscopy, Cameras, Optical testing
In this paper, we suggest a direct method based on light scattering and Beckmann formulation for the coarse surface
RMS roughness and correlation length measurements. Metallic steel samples irradiated under controlled interaction
conditions with ultrafast femtosecond laser system are selected as the random rough surfaces for investigation. Stabilized
low-intensity He-Ne laser and an appropriate power meter are selected as the main elements of the experimental
measurement probe. The light source and detector are located symmetrically around the surface normal and the reflected
light is collected to be used in Beckmann formulation. In this regard, the dependency of the surface scattering to the
illumination angle is also investigated. Atomic Force Microscopy and Scanning Electron Microscopy are utilized as
standard common methods to extract the surface features and check the reliability of the theoretical approach.
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