Dr. Ionela-Daniela Carja Profile

Dr. Ionela-Daniela Carja

at Merck KGaA

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Publications (3)

Proceedings Article | 10 April 2024 Presentation

Sustainable solutions to PFAS photoacid generators used in chemically amplified resists

Daniela Carja, Hung-Yang Chen, Takayuki Sao, Hiroshi Hitokawa, Philipp-Hans Fackler, Chunwei Chen, Ralph Dammel

Proceedings Volume 12957, 1295703 (2024) https://doi.org/10.1117/12.3010645

KEYWORDS: Photoacid generators, Sustainability, Chemically amplified resists, Photoresist materials, Transparency, Photoresist developing, Lithography, Toxicity, Thermal stability, Structural design

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Proceedings Article | 9 April 2024 Poster + Paper

PFAS-free I-line strong photoacid generator for positive-tone and negative-tone thick-film photoresists

Hung-Yang Chen, Ionela-Daniela Carja, Chunwei Chen, Ashley Moore, Philipp Hans Fackler, Ralph Dammel

Proceedings Volume 12957, 129571H (2024) https://doi.org/10.1117/12.3009506

KEYWORDS: Photoresist materials, Photoacid generators, Copper, Silicon, Film thickness, Lithography, Semiconductors, Semiconducting wafers, Fabrication, Photoresist developing

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Proceedings Article | 14 December 2016 Paper

Synthesis and characterization of novel main chain bisazobenzene polyphosphonates

Tăchiţă Vlad-Bubulac, Diana Serbezeanu, Ionela-Daniela Carja

Proceedings Volume 10010, 100100G (2016) https://doi.org/10.1117/12.2243339

KEYWORDS: Polymers, Liquid crystals, Liquids, Crystals, Chemical analysis, FT-IR spectroscopy, Spectroscopy, X-ray diffraction, Calorimetry, Temperature metrology

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