Dr. Zhihong Mai Profile

Dr. Zhihong Mai

at GLOBALFOUNDRIES Singapore

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Publications (1)

Proceedings Article | 12 April 2005 Paper

Backside sample preparation with laser-enhanced chemical etching for infrared photon imaging

Qin Deng, Zhihong Mai, Ran He, Tawei Tao, Jeffrey Lam, Yongfeng Lu

Proceedings Volume 5713, (2005) https://doi.org/10.1117/12.596665

KEYWORDS: Silicon, Wet etching, Etching, Infrared radiation, Polishing, Infrared imaging, Laser irradiation, Chemical lasers, Infrared photography, Chemical reactions

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