In order to make the polishing slurry distribution more uniform over the polishing region, a new kind of polishing pad,
which has sunflower seed pattern, has been designed based on the phyllotaxis theory of biology, and the boundary
conditions of polishing slurry flow have been established. By the help of computational fluid dynamics software
(FLUENT), the flow state of the polishing slurry is simulated and the effects of the phyllotactic parameters of polishing
pad on the flow field of polishing slurry are analyzed. The results show that when the polishing slurry is imported from
the center of phyllotaxis polishing pad, the slurry flows along the counterclockwise and clockwise spiral grooves of
phyllotatic pattern, which make fluid flow divergence around, and the flow field becomes more uniform.
In order to obtain the effects of the kinematical state to the profile precision of the fiber optic end surface in the process
of lapping and polishing, a kinematical equation of the lap- polisher with the slider-crank movement is developed, and
based on these equations and the tribological model of CMP, the dimensionless distribution of the material removal
volume (DDMRV) and the trajectory of abrasive grains cutting on the lap-polisher are numerically simulated with the
way of stochastic abrasive grains, then the effects of the parameters of the lap-polisher on the uniformity of the
DDMRV and the trajectory on the fiber optical end surface are discussed, and the results are that the DDMRV and the
trajectory of abrasive grains have rather better value when the crank length E is chosen in a advisable parameter region
and the rotational speed n1 of the crank is increased and the rotation speed n0 of the guide plate is decreased.
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