Dr. Young-Seok Kim Profile

Dr. Young-Seok Kim

at ASML Korea Co Ltd

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Publications (2)

Proceedings Article | 22 February 2021 Poster + Paper

Enhancing model accuracy and calibration efficiency with image-based pattern selection using machine learning techniques

Ren-Cheng Sun, Dae-Kwon Kang, Chester Jia, Meng Liu, De-Bao Shao, Young-Seok Kim, Jangho Shin, Mark Simmons, Qian Zhao, Mu Feng, Yiqiong Zhao, Shibing Wang, Sungho Kim, Sungwoo Ko, Shinyoung Kim, Jaeseung Choi, Chanha Park

Proceedings Volume 11613, 116130Y (2021) https://doi.org/10.1117/12.2584692

KEYWORDS: Calibration, Machine learning, Signal processing, Physics, Optical proximity correction, Metrology, Lithography, Computational lithography

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Proceedings Article | 26 March 2019 Presentation + Paper

OPC model accuracy study using high volume contour based gauges and deep learning on memory device

Young-Seok Kim, SeIl Lee, Zhenyu Hou, Yiqiong Zhao, Meng Liu, Yunan Zheng, Qian Zhao, Daekwon Kang, Lei Wang, Mark Simmons, Mu Feng, Jun Lang, Byoung-Il Choi, Gilbert Kim, Hakyong Sim, Jongcheon Park, Gyun Yoo, JeonKyu Lee, Sung-woo Ko, Jaeseung Choi, Cheolkyun Kim, Chanha Park

Proceedings Volume 10959, 1095913 (2019) https://doi.org/10.1117/12.2515274

KEYWORDS: Calibration, Metrology, Optical proximity correction, Data modeling, Instrument modeling, Scanning electron microscopy, Time metrology, Neural networks, Semiconducting wafers

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