During the calibration of optical microscopic image measurement system, how to quickly and accurately extract the feature point coordinates from micro image of calibration sample is the key factor to affect the calibration precision. Microscope calibration has unique characteristics that are quite different from traditional camera calibration. In this paper, a method for extracting feature points of micro calibration sample is provided based on the analysis of microscope calibration system and calibration sample. The method preprocesses the micro image with threshold segmentation, dilation, erosion and other operations; then labels connected components and computes the coordinates of the feature points by computing centroid of image connected regions. The experiment results show that this method can quickly and efficiently obtain the coordinates of the feature points.
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