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Xuran Chang
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Publications (1)
Proceedings Article | 11 October 2024 Paper
Optimization method of scanning strategy for reactive ion beam etching of large aperture grating elements
Proceedings Volume 13278, 1327802 (2024) https://doi.org/10.1117/12.3032015
KEYWORDS: Etching, Convolution, Reactive ion etching, Ion beams, Diffraction gratings, Optical gratings, Defense technologies, Blazed gratings, 3D modeling, Superposition
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