CONFERENCE PROCEEDINGS
Advanced Search
Uday Mahajan
at KLA Corp
SPIE Involvement:
Author
Publications (1)
Proceedings Article | 4 December 2008 Paper
Advanced inspection methodologies for detection and classification of killer substrate defects
Aris Chen, Victor Huang, Sophie Chen, C. J. Tsai, Kenneth Wu, Haiping Zhang, Kevin Sun, Jason Saito, Henry Chen, Debbie Hu, Ming Li, William Shen, Uday Mahajan
Proceedings Volume 7140, 71400W (2008) https://doi.org/10.1117/12.804558
KEYWORDS: Semiconducting wafers, Inspection, Particles, Light scattering, Coating, Polishing, Scattering, Scanning electron microscopy, Crystals, Defect inspection
SIGN IN TO:
  • View contact details
UPDATE YOUR PROFILE
Is this your profile? Update it now.
Sign into your SPIE.org account
Don’t have a profile and want one?
Create an account on SPIE.org
Advertisement
Advertisement
Back to Top