A new scheme for optimizing a computer-generated hologram (CGH) in holographic laser processing system is proposed. The CGH that generates two- and three-dimensionally arranged focusing spots is optimized during laser processing. The scheme called as an in-system optimization has the potential to compensate for static imperfections and dynamic changes of the laser processing system by the rewritable capability of a liquid crystal on silicon spatial light modulator (LCOS-SLM).
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