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Dr. Takayuki Hagiwara
at Meiden Nanoprocess Innovations Inc
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Publications (3)
SPIE Journal Paper | 4 November 2024
Atomic layer deposited protective coating of aluminum oxide on silver-based telescope mirror: a comparison between a pure ozone and H2O precursor
Søren Tornøe, Brandon Cheney, Brian Dupraw, Yoshimasa Okamura, Andrew Phillips, Takayuki Hagiwara, Tetsuya Nishiguchi, Nobuhiko Kobayashi
JATIS, Vol. 10, Issue 04, 044007, (November 2024) https://doi.org/10.1117/12.10.1117/1.JATIS.10.4.044007
KEYWORDS: Protective coatings, Silver, Atomic layer deposition, Reflectivity, Corrosion, Ozone, Mirrors, Aluminum mirrors, Oxygen, Telescopes
Proceedings Article | 3 October 2024 Presentation
Comparison of long-term resilience of aluminum oxide protective coating on Ag-mirrors via low temperature atomic layer deposition using water and high-purity ozone as oxygen precursors
Proceedings Volume PC13114, PC1311404 (2024) https://doi.org/10.1117/12.3028878
KEYWORDS: Protective coatings, Ozone, Oxygen, Atomic layer deposition
Proceedings Article | 26 August 2024 Presentation
Progressive structural changes in silver-based telescope mirrors with an aluminum oxide protection layer prepared via thermal atomic layer deposition using water and high purity ozone: a comparative study for long-term resilience (Conference Presentation)
Proceedings Volume 13100, 131001Z (2024) https://doi.org/10.1117/12.3010997
KEYWORDS: Atomic layer deposition, Protective coatings, Ozone, Vacuum chambers, Telescopes, Statistical analysis, Reflectivity, Mirrors, Aluminum mirrors, Oxygen
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