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Suguru Sassa
at Nissan Chemical Corp
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Author
Publications (2)
Proceedings Article | 23 March 2020 Paper
Development of ion exchange purification for advanced materials contain siloxane polymer
Takumi Oya, Suguru Sassa
Proceedings Volume 11326, 113261R (2020) https://doi.org/10.1117/12.2553654
KEYWORDS: Ion exchange, Polymers, Polymerization, Metals, Ions, Silicon
Proceedings Article | 28 March 2012 Paper
The novel spin-on hard mask and ultrathin UL material for EUVL
Rikimaru Sakamoto, Hiroaki Yaguchi, Syuhei Shigaki, Suguru Sassa, Noriaki Fujitani, Takafumi Endo, Ryuji Onishi, Bang Ching Ho
Proceedings Volume 8325, 832512 (2012) https://doi.org/10.1117/12.916328
KEYWORDS: Extreme ultraviolet lithography, Coating, Polymers, Roentgenium, Lithography, Extreme ultraviolet, Etching, Line width roughness, Photomasks, Silica
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