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Stephan Rafler
at Univ Stuttgart
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Author
Publications (5)
Proceedings Article | 3 October 2008 Paper
Influence of line edge roughness (LER) on angular resolved and on spectroscopic scatterometry
Proceedings Volume 7155, 71550W (2008) https://doi.org/10.1117/12.814532
KEYWORDS: Line edge roughness, Scatterometry, Diffraction, Spectroscopic ellipsometry, Spectroscopy, Computer simulations, Polarization, Semiconductors, Lithography, Critical dimension metrology
Proceedings Article | 25 April 2008 Paper
Investigation of methods to set up the normal vector field for the differential method
Stephan Rafler, Peter Götz, Matthias Petschow, Thomas Schuster, Karsten Frenner, Wolfgang Osten
Proceedings Volume 6995, 69950Y (2008) https://doi.org/10.1117/12.780482
KEYWORDS: Refractive index, Lithium, Aluminum, 3D image processing, Maxwell's equations, Diffraction, Fourier transforms, Raster graphics, Image filtering, Magnetism
Proceedings Article | 16 April 2008 Paper
Improvements on the simulation of microscopic images for the defect detection of nanostructures
Stephan Rafler, Thomas Schuster, Karsten Frenner, Wolfgang Osten, Uwe Seifert
Proceedings Volume 6922, 692215 (2008) https://doi.org/10.1117/12.772498
KEYWORDS: Defect detection, Etching, Semiconducting wafers, Diffraction, Nanostructures, Wafer-level optics, Scanning electron microscopy, Polarization, Computer simulations, Manufacturing
Proceedings Article | 18 June 2007 Paper
Scatterometry from crossed grating structures in different configurations
Proceedings Volume 6617, 661715 (2007) https://doi.org/10.1117/12.726229
KEYWORDS: Scatterometry, Picosecond phenomena, Polarization, Scanning electron microscopy, Diffraction, Jones vectors, Etching, Ellipsometry, Spectroscopic ellipsometry, Systems modeling
Proceedings Article | 18 June 2007 Paper
High-resolution tomographic interferometry of optical phase elements
Proceedings Volume 6616, 66160J (2007) https://doi.org/10.1117/12.726103
KEYWORDS: Tomography, Diffraction, Refractive index, Interferometry, Reconstruction algorithms, Imaging systems, Phase measurement, Photonic crystal fibers, Image resolution, Objectives
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