Dr. Søren Jensen Profile

Dr. Søren Jensen

at Danmarks Tekniske Univ

SPIE Involvement:

Author

Publications (2)

Proceedings Article | 22 January 2005 Paper

Uniformity-improving dummy structures for deep reactive ion etching (DRIE) processes

Soren Jensen, Jonas Jensen, Ulrich Quaade, Ole Hansen

Proceedings Volume 5715, (2005) https://doi.org/10.1117/12.588552

KEYWORDS: Etching, Semiconducting wafers, Tolerancing, Deep reactive ion etching, Fluorine, Finite element methods, Silicon, Photomasks, Plasma, Modeling

Read Abstract +

Proceedings Article | 30 December 2003 Paper

Characterization of the microloading effect in deep reactive ion etching of silicon

Soren Jensen, Ole Hansen

Proceedings Volume 5342, (2003) https://doi.org/10.1117/12.524461

KEYWORDS: Etching, Deep reactive ion etching, Semiconducting wafers, Fluorine, Silicon, Reactive ion etching, Diffusion, Scanning electron microscopy, Ions, Microelectromechanical systems

Read Abstract +

View contact details

UPDATE YOUR PROFILE

Is this your profile? Update it now.

Sign into your SPIE.org account

Don’t have a profile and want one?

Create an account on SPIE.org

Keywords/Phrases

Search In:

Publication Years