Ms. Song Xue Profile

Song Xue

at Tsinghua Univ

SPIE Involvement:

Author

Publications (1)

Proceedings Article | 17 September 2002 Paper

Yanjun Han, Song Xue, Wenping Guo, Zhi-Biao Hao, Changzheng Sun, Yi Luo

Proceedings Volume 4918, (2002) https://doi.org/10.1117/12.483055

KEYWORDS: Etching, Gallium nitride, Plasma, Resistance, Plasma etching, Edge emitting semiconductor lasers, Annealing, Oxides, Ions, Metals

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Keywords/Phrases