Mr. Shinji Tanaka Profile

Shinji Tanaka

Chief Researcher at Idemitsu Kosan Co Ltd

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Author

Publications (4)

Proceedings Article | 1 April 2009 Paper

Adamantane-based molecular glass resist for 193-nm lithography

Shinji Tanaka, Miki Murakami, Kazuya Fukushima, Naoya Kawano, Yohitaka Uenoyama, Katsuki Ito, Hidetoshi Ohno, Nobuaki Matsumoto

Proceedings Volume 7273, 72732M (2009) https://doi.org/10.1117/12.814070

KEYWORDS: Glasses, Lithography, Semiconducting wafers, Silicon, Standards development, Transparency, Optical lithography, Polymers, Scanning electron microscopy, Extreme ultraviolet lithography

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Proceedings Article | 4 April 2008 Paper

Adamantane-based molecular glass resist for 193-nm lithography and beyond

Shinji Tanaka, Nobuaki Matsumoto, Hidetoshi Ohno, Naoyoshi Hatakeyama, Katsuki Ito, Kazuya Fukushima, Hiroaki Oizumi, Iwao Nishiyama

Proceedings Volume 6923, 69231J (2008) https://doi.org/10.1117/12.772249

KEYWORDS: Glasses, Lithography, Refractive index, Polymers, Transparency, Extreme ultraviolet lithography, Radium, Optical lithography, Immersion lithography, Sulfur

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Proceedings Article | 27 March 2008 Paper

Leading-edge adamantyl polymers designed for 193 nm lithography

Kazuya Fukushima, Shinji Tanaka, Nobuaki Matsumoto, Hidetoshi Ohno, Naoya Kawano, Hideki Yamane, Naoyoshi Hatakeyama, Katsuki Ito

Proceedings Volume 6923, 692335 (2008) https://doi.org/10.1117/12.772251

KEYWORDS: Polymers, Refractive index, Magnesium, Chemical species, Transparency, Radium, Lithography, Line edge roughness, Sulfur, Atomic force microscopy

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Proceedings Article | 29 March 2006 Paper

Adamantane based molecular glass resist for 193 nm lithography

Shinji Tanaka, Christopher Ober

Proceedings Volume 6153, 61532B (2006) https://doi.org/10.1117/12.658083

KEYWORDS: Glasses, Magnesium, Lithography, Etching, Nitrogen, Sodium, Resistance, Line width roughness, Line edge roughness, Electron beam lithography

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