In this work, we present the design parameters and optimization of the nanoscale gap interdigitated electrodes (IDEs) for
hydrogen gas sensing. In order to extract important design parameters and understand the sensor performance, numerical
analysis has been carried out for calculating the electric potential, electrical field and surface charge distribution on the
IDEs. The results show that the strength of the electrical field drops with the increase in distance from IDEs depending
on the gap spacing and finger width of the electrodes. Based on the sensing mechanism of our sensor, the current
distribution inside the sensing film is calculated showing that the thin sensing film could result in fast response due to the
uniform electrical field distribution. Effects of the gap spacing and width on the sensing performance were investigated
numerically. The optimized design of IDEs with 50 nm in gap and 1,000 nm in width shows that the change of electrical
field in the thickness direction is much reduced for a given 120 nm-thick sensing layer on top of the IDEs. It is expected
that this design responds better to hydrogen induced conductivity change on top surface and leads to shorter response
time.
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