To detect a signal change in nano scale, Schottky barrier - silicon nanowire field effect transistor (SB-SiNWFET) for
detecting a bio-molecule was fabricated by combining E-beam lithography and conventional MEMS technique.
Detection of few bio-molecules is enabled by realizing the gold nanodots on silicon nanowire (SiNW). By performing
pH test and carbohydrate binding measurement, we conclude that our sensor can detect very small quantity of biomolecules.
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