Mr. Noriko Iida nee Sakurai Profile

Noriko Iida nee Sakurai

at KIOXIA Corp.

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Author

Publications (2)

Proceedings Article | 26 October 2020 Presentation + Paper

Resist pattern inspection for defect reduction in sub-15 nm templates

Takeharu Motokawa, Machiko Suenaga, Kazuki Hagihara, Noriko Iida nee Sakurai, Ryu Komatsu, Hideaki Sakurai, Shingo Kanamitsu, Keisuke Tsuda, Tetsuo Harada, Takeo Watanabe

Proceedings Volume 11518, 115180H (2020) https://doi.org/10.1117/12.2572389

KEYWORDS: Inspection, Defect inspection, Scanning electron microscopy, Double patterning technology, Nanoimprint lithography, High volume manufacturing, Electron microscopes, Scatterometry, Microscopes, Coherence imaging

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Proceedings Article | 29 January 2020 Paper

Template development for sub15nm nanoimprint lithography

Ryota Seki, Akihiko Ando, Takeharu Motokawa, Machiko Suenaga, Noriko Iida nee Sakurai, Ryu Komatsu, Masato Naka, Rikiya Taniguchi, Syuichi Taniguchi, Kazuki Hagihara, Masato Saito, Hideaki Sakurai, Ryoji Yoshikawa, Eiji Yamanaka, Shingo Kanamitsu

Proceedings Volume 11178, 111780S (2020) https://doi.org/10.1117/12.2567043

KEYWORDS: Nanoimprint lithography, Critical dimension metrology, Semiconducting wafers, Inspection, Scanning electron microscopy, Optical lithography, Etching, Lithography, Double patterning technology, Quartz

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