Mr. Nicholas P. Calvano Profile

Nicholas P. Calvano

at Delaware State Univ

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Publications (5)

Proceedings Article | 18 September 2018 Presentation + Paper

Electrical and optical characterization of AlxNy thin films

Nicholas Calvano, Bakare O'Neil, Mukti Rana

Proceedings Volume 10766, 107660D (2018) https://doi.org/10.1117/12.2323181

KEYWORDS: Thin films, Aluminum, Refractive index, Dielectrics, Temperature metrology, Crystals, Transmittance, Reflectivity, Absorption, Capacitors

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We report the deposition and characterization of 𝐴𝑙_𝑥𝑁_𝑦 thin films to use them as pyroelectric detector. 𝐴𝑙_𝑥𝑁_𝑦 thin films were deposited using a direct current (DC) magnetron sputtering from an Al target with varying concentrations of Ar:N2 at constant pressure and substrate temperature. The film thickness' were varied between 100-200 nm with varying atomic composition based on Ar:N₂ during deposition. The nitrogen content in the films varied from 39.0% to 44.7% as found by energy dispersive spectroscopy (EDS). Each of the thin films was annealed at a different temperature between 400 to 800 °C with 100 °C increment in N₂ environment and X-ray diffraction (XRD) was performed to analyze the annealed films crystallinity. From the XRD data and by using Scherrer equation, we found that for samples annealed at 600 °C for fifteen minutes has the grain size of 12.28 nm. Optical properties of the films were measured with varying wavelengths which include transmission, reflection, absorption, refraction coefficient, extinction coefficient and the optical bandgap. We also determined the electrical properties of thin films’ which include the pyroelectric coefficient, pyroelectric current, dielectric constant, and film permittivity between the temperature range 270 K to 310 K. As the temperature is increased, the pyroelectric coefficient also increased almost linearly. The pyroelectric coefficient of annealed 𝐴𝑙_𝑥𝑁_𝑦 films found to be varied between 4.86 × 10^-5 C/m²K to 1.32 × 10^-4 C/m²K. The optical transmittance through the as grown non-annealed thin films was found to be varied between 35 to 78%, while the reflectance was found to be below 25%. Because of low absorption in the thin films the extinction coefficient was found to be near zero. The refractive index was varied between 1.7 and 2.2 for the 𝐴𝑙_𝑥𝑁_𝑦 thin films. The optical bandgap was found to be 1.40 eV for non-annealed 𝐴𝑙_𝑥𝑁_𝑦 thin film which was deposited on cover glass. The dielectric constant was varied between 30-1200000 depending on the annealing temperature of the film, while the film permittivity ranges between 0-1.25×10^-5 F/m.

Proceedings Article | 23 August 2017 Paper

Properties of reactively sputtered AlxNy thin films for pyroelectric detectors

Nicholas Calvano, Philip Chrostoski, Andrew Voshell, Keesean Braithwaite, Mukti Rana

Proceedings Volume 10381, 103810J (2017) https://doi.org/10.1117/12.2281240

KEYWORDS: Aluminum, Thin films, Refractive index, Pyroelectric detectors, Polarization, Scanning electron microscopy, Temperature metrology, Capacitors, Sputter deposition, Transmittance

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Proceedings Article | 28 April 2017 Presentation + Paper

Radio frequency sputtered AlxNy thin films for thermal detectors

Nicholas Calvano, Philip Chrostoski, Andrew Voshell, Keesean Braithwaite, Dennis Prather, Murzy Jhabvala, Mukti Rana

Proceedings Volume 10209, 102090J (2017) https://doi.org/10.1117/12.2267089

KEYWORDS: Pyroelectric detectors, Infrared detection, Infrared sensors, Aluminum nitride, Aluminum, Sputter deposition, Temperature metrology, Silicon, Dielectric polarization

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Proceedings Article | 28 April 2017 Presentation + Paper

Calcium lead titanate thin films for pyroelectric detection

Philip Chrostoski, Nicholas Calvano, Bakare O'Neil, Andrew Voshell, Keesean Braithwaite, Dennis Prather, Murzy Jhabvala, Mukti Rana

Proceedings Volume 10209, 102090N (2017) https://doi.org/10.1117/12.2264098

KEYWORDS: Pyroelectric detectors, Pyroelectricity, Crystals, Sputter deposition, Temperature metrology

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Proceedings Article | 9 June 2014 Paper

A polarimetric scanning LADAR: system development and performance analysis

Yury Markushin, Nicholas Calvano, Gour Pati, Renu Tripathi

Proceedings Volume 9080, 908004 (2014) https://doi.org/10.1117/12.2050469

KEYWORDS: LIDAR, Polarimetry, Polarization, Wave plates, Avalanche photodetectors, Sensors, Imaging systems, Polarizers, Reflectors, Spatial resolution

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