Dr. Matthias Falmbigl Profile

Dr. Matthias Falmbigl

at Veeco Instruments Inc

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Publications (2)

Proceedings Article | 13 March 2024 Poster

Reactive ion beam etch of highly uniform slanted gratings for augmented reality applications

Maryam Souri, Vincent Ip, Matthias Falmbigl, Meng Lee, Mark Campo, Robert Caldwell

Proceedings Volume PC12913, PC129130M (2024) https://doi.org/10.1117/12.3001026

KEYWORDS: Etching, Reactive ion etching, Augmented reality, Semiconducting wafers, Optical gratings, Ion beams, Industrial applications, Blazed gratings, Wet etching, Waveguides

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Proceedings Article | 5 March 2021 Presentation + Paper

Effect of annealing on properties and performance of HfO2/SiO2 optical coatings for UV-applications

Matthias Falmbigl, Kyle Godin, Riju Singhal, Jason George, Binyamin Rubin

Proceedings Volume 11687, 116871U (2021) https://doi.org/10.1117/12.2578893

KEYWORDS: Optical coatings, Annealing, Sputter deposition, Pulsed laser operation, Absorption, Ultraviolet radiation, Semiconductor manufacturing, Semiconductor lasers, Reflectivity, Mirrors

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