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Masakazu Hashimoto
at Zeon Corp.
SPIE Involvement:
Author
Publications (1)
Proceedings Article | 3 October 2018 Presentation + Paper
Material design for the improvement of ZEP520A performance
Proceedings Volume 10810, 108100O (2018) https://doi.org/10.1117/12.2501648
KEYWORDS: Polymers, Electron beam lithography, Molecules, Scanning electron microscopy, Silicon, Semiconducting wafers, Lithography, Nanolithography, Nanoimprint lithography, Polymethylmethacrylate
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