Dr. Martin Plihal Profile

Dr. Martin Plihal

Sr Manager, Machine Learning at KLA Corp

SPIE Involvement:

Author

Publications (1)

Proceedings Article | 3 October 2018 Paper

EUV stochastic defect monitoring with advanced broadband optical wafer inspection and e-beam review systems

Kaushik Sah, Andrew Cross, Martin Plihal, Vidyasagar Anantha, Raghav Babulnath, Derek Fung, Peter De Bisschop, Sandip Halder

Proceedings Volume 10809, 1080909 (2018) https://doi.org/10.1117/12.2501825

KEYWORDS: Stochastic processes, Inspection, Scanning electron microscopy, Optical inspection, Photomasks, Etching, Extreme ultraviolet, Semiconducting wafers, Printing, Critical dimension metrology

Read Abstract +

View contact details

UPDATE YOUR PROFILE

Is this your profile? Update it now.

Sign into your SPIE.org account

Don’t have a profile and want one?

Create an account on SPIE.org

Keywords/Phrases

Search In:

Publication Years