Mr. Lijun Shen Profile

Lijun Shen

at Institute of Optics and Electronics CAS

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Publications (2)

Proceedings Article | 18 September 2014 Paper

A sampling method to measure surface roughness of circular flat

Kai Meng, Yongjian Wan, Fan Wu, Lijun Shen, Weihong Song

Proceedings Volume 9282, 92820J (2014) https://doi.org/10.1117/12.2073329

KEYWORDS: Surface roughness, Electronic support measures, Optical testing, Interferometers, Mathematics, Silicon, Optics manufacturing, Reliability, Statistical analysis, Fluctuations and noise

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Proceedings Article | 6 August 2014 Paper

Influence factors of optical surface roughness in traditional polishing process

Li-Jun Shen, Yong-Jian Wan, Kai Meng

Proceedings Volume 9281, 92811Y (2014) https://doi.org/10.1117/12.2073259

KEYWORDS: Polishing, Surface finishing, Abrasives, Surface roughness, Glasses, Mirrors, Particles, Semiconducting wafers, Electronics, Information technology

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